Abstract
A unique nanoscale gap configuration having parallel-plate electrodes and an integrated flow structure was designed, developed, and fabricated using micro- and nanomachining techniques. This structure is highly manufacturable and shows an excellent fabrication yield (more than 90%). Applications data are presented for 30 and 50nm gap spacing structures used to monitor the formation of a 6-mercapto-1-hexanol self-assembled monolayer on the device electrode surfaces. The structure was found to be very robust in a high, inter-electrode electric-field environment (∼6×106V∕cm in air).
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