Abstract
We have studied the technologies for the fabrication of a diamond/SiC double layer for use as an x‐ray mask membrane. Each film layer (diamond and SiC) has excellent quality, i.e., crystallinity and purity, and is a precisely stress‐controlled freestanding membrane of the diamond/SiC double layer. We have fabricated the diamond/SiC double layer membrane and have also evaluated important properties required for the use of the membrane as an x‐ray mask in detail. Surface roughness of the diamond layer was made to be 7 nm rms using the chemical‐mechanical polishing technique. Due to the smoothing, the amount of incident light scattered at the diamond surface was decreased, and the visible light (λ = 633 nm) transmittance of the diamond/SiC double layer membrane (film thicknesses: diamond/SiC = 1.1 μm/0.3 μm) attained a maximum value of 64%. It was confirmed by transmission electron microscopy observation that the diamond/SiC boundary layer had a coexistence region, so the double layer had strong adhesion. Furthermore, we evaluated the biaxial Young's modulus using the bulge method, which was 1070 GPa for the diamond/SiC double layer.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
