Abstract
In this paper, a silicon on insulator based electrostatic micro-scanner with extremely lowpull-in voltage and fast switching time is proposed. Two symmetric mirror plates aresuspended by a cross suspension lever anchored on the substrate. A buried silicon dioxide(BOX) layer underneath the anchors separates the two actuation electrodes. Thesymmetric design can not only provide better balance of the mirror plates than cantileverdesign but also increase the dynamic range by scanning in two directions. The structuralparameters of the micro-scanner are optimized for a combination of dynamicperformance and actuation voltage according to finite element analysis (FEA).Squeeze film damping effects are addressed by a comparison of the theoreticalanalysis using FEA with experimental results. The testing results show that thepull-in voltage of the micro-scanner is as low as 2.7 V, making it compatible withoff-the-shelf control logic circuits. The demonstrated tilt angle is approximately0.5° and may be increased by adjusting the thickness of the pre-specified BOX layer.
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