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Abstract
This paper presents the fabrication and testing of electrostatic actuators with p + diaphragms. The actuators consist of two counter electrodes which are fabricated on a silicon wafer and Pyrex glass, respectively. The p + diaphragm is used as a moving electrode, whereas the aluminium layer deposited on #7740 Pyrex glass is used as a fixed electrode. According to the calculation of static deflection of diaphragms with residual tensile stress, corrugated diaphragms deflect more than a flat one in most deflection regions. The dynamic characteristics of an actuator with a corrugated diaphragm and one with a flat diaphragm are tested and compared with the calculation results.
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