Abstract
This paper presents fabrication and drive test of a peristaltic PDMS micropump actuated by the thermopneumatic force The micropump consists of the three peristaltic-type actuator chambers with microheaters on the glass substrate and a microchannel connecting the chambers and the inlet/outlet port The micropump is fabricated by the spill-coating process, the two-step curing process, the JSR (negative PR) molding process, and etc The diameter and the thickness of the actuator diaphragm are 2 5 mm and 30 ㎛, respectively The meniscus motion in the capillary tube is observed with a video camera and the flow rate of the micro pump is calculated through the frame analysis of the recorded video data. The maximum flow rate of the micro-pump is about 0.36 μL/ sec at 2 Hz for the zero hydraulic pressure difference when the 3-phase input voltage is 20 V.
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