Abstract
A novel method of producing carbon nanotube (CNT) probes using electron beam induced Pt deposition is proposed for application in atomic force microscopy (AFM). Focused ion beam milling and irradiation processes are utilized to precisely control the nanotube probe's length and orientation. It is confirmed that the stiffness of nanotube probe would not degrade AFM image resolution if its lateral force constant is larger than 0.086 N/m. The nanotube probe can detect an edge with 88° vertical angle. It is found that the nanotube probes with fullerene-like cap end present higher imaging resolution than those with an open end.
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