Abstract

Transparent semiconductor ZnO thin films deposited on interdigitated electrode (IDE) substrate substrates were obtained by low-cost sol-gel method. The coated ZnO films were annealed in furnace at 500°C for 2 hours. The influence of surface morphologies, crystallization and optical properties was investigated. The structural properties of the annealed ZnO thin films were examined with FESEM and AFM. XRD result shows that all polycrystalline ZnO thin film after annealing have the orientation along the (002) plane. Both FESEM and XRD results revealed that ZnO thin films were composed of hexagonal ZnO crystals in nanoscale dimensions. Moreover, UV-Vis was employed to study the optical properties of the ZnO films. Besides that, the deposited ZnO thin film will further use for pH by I-V curve tracer.

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