Abstract
We report on the fabrication and characterization of a ZnO-basedfilm-bulk acoustic-resonance device utilized as biosensor. Thedevice has a multilayer structure which consists of piezoelectricelement (Au/ZnO/Pt) and a Bragg-reflection-layer acoustic isolationconsisting of multilayers of ZnO/Pt. Dielectric measurements haverevealed that the device has a very high working frequency (up to~3.1 GHz), meaning that the device may have a higher sensitivitythan the devices reported in the literature.
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