Abstract
Abstract In this work, undoped and Fe doped ZnO thin films were deposited by ultrasonic spray technique on the glass substrates. Our interest is on the investigation of the Fe doping level influence on the structural, optical and electrical properties of ZnO thin films. The DRX analyses indicated that ZnO film have polycrystalline nature and hexagonal wurtzite structure with (002) preferential orientation and the measured average crystallite size of undoped and Fe doped ZnO thin films of 17.39, 19.73 and 12.38 nm for 0, 1 and 3% Fe, respectively. The thin film exhibit average optical transparency about 60–70%, in the visible region, hence, the values of the gap were found to be between 3.25, 3.28 and 3.22 eV for 0, 1 and 3% Fe, respectively. The minimum Urbach energy was found for 1% Fe, it is 0.151 eV. The electrical sheet resistance was increased from 0% to 3% Fe.KeywordsZnOThin filmFe dopingUltrasonic spray technique
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