Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization

Abstract

This paper, the second of two parts, presents extensive measurement and characterization results on fabricated thermally actuated single-crystal silicon MEMS resonators analyzed in part I. The resonators have been fabricated using a single mask process on SOI substrates. Resonant frequencies in a few hundreds of kHz to a few MHz and equivalent motional conductances as high as 102 mA V−1 have been measured for the fabricated resonators. The measurement results have been compared to the resonator characteristics predicted by the model developed in part I showing a good agreement between the two. Despite the relatively low frequencies, high quality factors (Q) of the order of a few thousand have been measured for the resonators under atmospheric pressure. The mass sensitivities of some of the resonators were characterized by embedding them in a custom-made test setup and deposition of artificially generated aerosol particles with known size and composition. The resulting measured mass sensitivities are of the order of tens to hundreds of Hz ng−1 and are in agreement with the expected values based on the resonator's physical dimensions. Finally, measurement of mass density of arbitrary airborne particles in the surrounding lab environment has been demonstrated.