Fabrication and characterization of self-aligned ZnO and TiO<inf>2</inf> nanostructured films

Abstract

Self-aligned nanostructured thin films of ZnO and TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> have been prepared by MOCVD and anodization method, respectively. The as-prepared films were characterized by XRD, SEM and XPS analysis. The deposition temperature and time have drastic effects on the crystallinity and morphology of the nanostructured ZnO films. On the other hand, films of TiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> nanotube array (TNA) are markedly affected by the composition of electrolyte used during anodization process. The as-prepared TNA films are amorphous in nature but high crystallined anatase phase could be obtained at low temperature using hydrothermal treatment.