Abstract
A systematic study of the fabrication and characterization of planar optical waveguides in Z-LiNbO3, fabricated by the proton exchange technique using orthophosphoric acid is reported. The guides are fabricated by immersing lithium niobate substrates in orthophosphoric acid for different durations. The results are compared with those for guides fabricated using benzoic acid under similar conditions. The data are analyzed to calculate the value of the diffusion coefficients. The surface index and the depth produced using the orthophosphoric acid proton exchange process is marginally higher.
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