Abstract
In the last decade, an increase of attention to monitoring the hazardous gases and vapors in industry, laboratories, and homes has attracted extensive interest in developing gas sensors. This research investigates the use of porous WO3 thin film as a high accuracy cyclohexene sensor. Oblique deposition and subsequently the post-annealing process were employed to produce the mentioned device. X-ray diffraction (XRD), atomic force microscopy (AFM), and physical adsorption isotherm were used to investigate the crystallographic structure, surface morphology, and porosity of the sample, respectively. Sensing parameters including response amplitude, operating temperature, response and recovery times, detection limit, selectivity, reproducibility, and stability were also studied to find a deep-perception of the device sensing performance. The results disclose that the prepared device in this research shows a decent and fast response to the object and can be introduced as a reliable cyclohexene sensor.
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