Abstract
We demonstrated high-speed metal-based Lamb-wave-resonance piezoelectric-drive optical micro-electric-mechanical system (MEMS) scanning devices using lead-free piezoelectric direct coated substrate sheets. The BaTiO3-based lead-free piezoelectric direct coated substrate sheet prepared by aerosol deposition achieved a piezoelectric d31 of approximately -138 pm/V. The metal-based optical scanning devices have a 1 mm circular mirror. Under the ambient air, the wide optical scanning angle of 58° and the high resonance frequency of 26.681 kHz were achieved at the applied voltage of less than 30 V.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
