Fabrication and characterization of lateral ‘‘cusp-edge’’ and ‘‘knife-edge’’ geometry cathodes

Abstract

Two lift-off techniques are demonstrated to form lateral field emission cathodes by shadowing a sputter deposition for tungsten composite. A current of 26 μA is observed for ‘‘knife-edge’’ cathodes of 23 μm edge length. The I–V characteristics are consistent with the Fowler–Nordheim relationship. The effect of focusing electrodes for increasing anode collection efficiency is consistent with our electron trajectory tracing simulations. The fabrication process for these devices is described in detail.