Fabrication and Characterization of Iridium Oxide pH Microelectrodes Based on Sputter Deposition Method.

Ye Xi,Jingquan Liu,Longchun Wang,Tao Ruan,Qingda Xu,Zhejun Guo

doi:10.3390/s21154996

Abstract

pH value plays an important role in many fields such as chemistry and biology; therefore, rapid and accurate pH measurement is very important. Because of its advantages in preparation, wide test range, rapid response, and good biocompatibility, iridium oxide material has received more and more attention. In this paper, we present a method for preparing iridium oxide pH microelectrodes based on the sputter deposition method. The sputtering parameters of iridium oxide are also studied and optimized. Open-circuit potential tests show that microelectrodes exhibit near-Nernstian pH response with good linearity (about 60 mV/pH), fast response, high stability (a slight periodic fluctuation of potential change <2.5 mV in 24 h), and good reversibility in the pH range of 1.00–13.00.

Highlights

PH is a fundamental parameter in many fields ranging from agriculture, husbandry, and chemical engineering to biology and medicine; rapid and accurate pH measurements are especially important [1,2,3,4,5,6,7,8]
The preparation of the iridium oxide layer was based on the sputtering deposition The preparation of the iridium oxide layer was based theprepared sputtering deposition method because the response sensitivity of the iridium oxide on layer by this method method because the response sensitivity of the iridium oxide layer prepared byreprothis was close to the Nernst response of 59 mV/pH, and the response results had high method was close to the Nernst response of mV/pH, and the response results had high ducibility
Considering that the iridium oxide film was prepared on a gold layer, the results showed that the iridium film successfully was prepared on a gold layer, the results showed that the film of the film of iridium oxideoxide had been deposited using the sputtering deposition iridium oxide had been successfully deposited using the sputtering deposition method

Summary

Introduction

PH is a fundamental parameter in many fields ranging from agriculture, husbandry, and chemical engineering to biology and medicine; rapid and accurate pH measurements are especially important [1,2,3,4,5,6,7,8]. Researchers have been working on the development of novel pH microsensors, in the context of which metal/metal oxide electrodes have received more and more attention Among these metal oxide electrode materials, iridium and its oxides have attracted the most attention because they have advantages in processing, micromanipulation, wide test range, rapid response time, and good biocompatibility [11,12,13,14,15,16,17,18]. These characteristics make it suitable for extreme environments and in vivo pH measurement

Methods

Results

Conclusion