Abstract
Optical microresonators confine light at resonant frequency strongly in small volumes and are applied in various fields of quantum optics and nonlinear optics [1]. Figures of merit for microresonators in these applications are proportional to Q/V or Q 2 /V, where Q is the Q-factor and V is the cavity mode volume. Q-factors of 8 × 10 9 have been observed with silica spherical resonators with 750 μm in diameter fabricated by fusing silica rods [2][3]. However, it has been difficult to fabricate high-Q spheres with diameters smaller than 20 μm [4]. Here we fabricate high-Q monolithic microspherical resonators on a silicon chip with a diameter as small as 18 μm.
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