Abstract
We present a flexible variable-focus converging microlens actuated by electrowetting on dielectric (EWOD). The microlens is made of two immiscible liquids and a soft polymer, polydimethylsiloxane (PDMS). Parylene intermediate layer is used to produce robust flexible electrode on PDMS. A low-temperature PDMS-compatible fabrication process has been developed to reduce the stress on the lens structure. The lens has been demonstrated to be able to conform to curved surfaces smoothly. The focal length of the microlens is 29–38 mm on a flat surface, and 31–41 mm on a curved surface, varying with the voltage applied. The resolving power of the microlens is 25.39 line pairs per mm by a 1951 United States Air Force (USAF) resolution chart and the lens aberrations are measured by a Shack-Hartmann wavefront sensor. The focal length behavior on a curved surface is discussed and for the current lens demonstrated the focal length is slightly longer on the curved surface as a result of the effect of the curved PDMS substrate.
Highlights
Liquid lenses do not require complicated mechanical systems to change their focal lengths, and they are widely used in photonics, display and biomedical systems [1,2,3,4]
We have demonstrated a new design of flexible electrowetting on dielectric (EWOD) microlens which is made of soft flexible PDMS structure
The liquid lens is formed by a silicone oil droplet and the water covering it
Summary
Liquid lenses do not require complicated mechanical systems to change their focal lengths, and they are widely used in photonics, display and biomedical systems [1,2,3,4] Another rapidly-developing area in micro-optics is the fabrication of microlenses made on flexible polymer substrates [5,6], because. Micromachines 2014, 5 microlens array on a curved substrate have some significant advantages over planar microlenses, including wider field of view [6,7], creating 3-D effect [8,9] and mimicking artificial compound eyes [10] In virtue of these developments, emerging liquid-based variable-focus microlenses have become important components in modern miniaturized optical systems. The electrode, dielectric and hydrophobic layers were deposited on the sidewall of a polymer chamber to change the water surface from convex to concave shape and the water-oil interface is pinned on the sidewall of the chamber. The indium tin oxide (ITO) electrode is fragile due to the weak adhesion of ITO on polydimethylsiloxane (PDMS), a soft polymer
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