Abstract
ABSTRACTFe-Pd thin films with approximately 30 at.% Pd have been produced by magnetron sputtering. Various heat treatment conditions were studied in order to obtain the face-centered tetragonal (fct) martensitic phase at room temperature. X-ray diffractometry was used to identify the various phases present at room temperature and the substrate curvature technique was employed to measure film stress as a function of temperature. The shape memory effect was demonstrated in samples containing the fct martensite phase at room temperature.
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