Fabrication and characterization of annealed proton exchanged long period waveguide grating in x-cut LiNbO3

Abstract

In this paper, a long-period waveguide grating was fabricated in x-cut lithium niobate substrate by patterned annealed proton exchange waveguide fabrication process. The waveguide mode characteristic was evaluated using a charge-coupled device (CCD) camera. It shows that the waveguide is single mode transmission at a wavelength of 1 550 nm. The transmission spectra of the long period waveguide gratings were measured by optical spectrum analyzer (OSA) and show an extinction ratio of ~17 dB and a 3 dB bandwidth of ~10 nm at the resonant wavelength. The resonant wavelength moves toward to the long wavelength direction as the waveguide width-difference increases in the same period, and also shifts toward to the long wavelength direction with the increase of the period in the case of the same waveguide width-difference. The method of fabricating a long period waveguide grating based on a patterned annealed proton exchange technique simplifies the fabrication process, and at the same time, reduces the fabrication cost.