Fabrication and Characterization of Active-Matrix $960\times540$ Blue GaN-Based Micro-LED Display

Abstract

In this paper, we demonstrate a high-resolution $960\times 540$ blue-emitting active matrix micro-display. The blue micro-display have a diagonal length of 0.55 inch, a pixel size of $8~\mu \text{m}$ with a pixel pitch of $12.8~\mu \text{m}$ , and high pixel density of 2000 pixels per inch. The single pixel of micro-display exhibits excellent characteristics including an extremely low-leakage current of 0.1 pA at −5 V, a low forward voltage of 2.73 V, a narrow full width at half maximum of 15.7 nm of electroluminescence spectra, a high external quantum efficiency of 13.3%, and a deep-blue emission with CIE coordinates of (0.1589, 0.0542) at $11~\mu \text{A}$ . Besides, the single pixel of micro-LED also shows high brightness of $4.2 \times 10^{6}$ and $7.4 \times 10^{6}$ cd/m2 at $500~\mu \text{A}$ and 1 mA, respectively. The complete $960\times 540$ micro-display has a contrast ratio of 3600000:1, the power consumption with all on is 0.5 W, and the pixel yield rate of about 98.674% analyzed by the software ImageJ.