Abstract
A planar three-electrode microelectrochemical cell is fabricated using standard planar processing. The electrochemical behaviour of this device, consisting of two Pt electrodes (working and counter electrode) and one Ag/ Agcl reference electrode, is studied in order to draw a parallel between some technological parameters of thin-film processing and the electrode surface properties. An immobilized glucose oxidase membrane is then deposited and the amount of H 2O 2 produced is measured. In order to render the sensor response less dependent on pO 2. am additional outer polyurethane membrane is dip-coated. The overall dimensions of the device are 0.8 mm × 3 mm.
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