Abstract
This work presents a piezoelectric energy harvester with clamped-clamped beams, and it is fabricated with MEMS process. When excited by sinusoidal vibration, the energy harvester has a sharp jumping down phenomenon and the measured frequency responses of the clamped-clamped beams structure show a larger bandwidth which is about 56Hz, more efficient than that with cantilever beams. When the exciting acceleration ac is 12m/s2, the energy harvester achieves to a maximum open-circuit voltage of 94mV on one beam. The load voltage is proportional to the load resistance, and it increased with the increase of load resistance. Connected four beams in series, the output power reaches the maximum value of 730 nW and the optimal load is 15KΩ to one beam.
Highlights
Due to the rapid development of microelectronic equipment, microelectronic products have been widely used
The energy harvester presented is fabricated with MEMS process, as shown in Figure 2. (a) A piece of 2-inch double-side-polished silicon wafer is oxidized into SiO2 with a thickness of 2.5μm and the SiO2 layer is patterned on the backside of the wafer and bulk silicon is anisotropically etched
The front SiO2 layer is patterned by a U-shape to release the energy harvester. (b) A Ti layer and Pt layer are sputtered and patterned with corrosion. (c)The PZT thin film is deposited on the Pt/Ti/SiO2/Si substrate with sol-Gel method[12] and the thickness is about 1.8μm. (d)The top electrode is fabricated with sputtering method and the PZT thin film is corroded. (e) An insulating
Summary
Due to the rapid development of microelectronic equipment, microelectronic products have been widely used. The traditional piezoelectric energy harvesters with cantilever beam have a small carrying capacity, and a low energy collection efficiency and require external device to increase the bandwidth, such as magnets,[4] prestress[5] and so on. Compared with the cantilever beam, the stress of the clamped-clamped beam is more evenly distributed along the direction of the beam, improving the efficiency of energy collection.[6,7] And its nonlinear behavior[8] can broaden the bandwidth of energy harvesting. Xiudong Dang et al.[11] concluded that the additional mass will magnify the induced strain of the beam to improve the output. In this research, based on the conclusions of stress distribution and nonlinear phenomenon, the design, fabrication, and vibration characteristic of an energy harvester are reported.
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