Abstract
Epitaxially grown single-crystal perovskite (100) three-axis-oriented (Ba0.7Sr0.3)TiO3 thin films were prepared on a (100) platinum-coated (100) magnesium oxide (MgO) single-crystal substrate by the chemical solution deposition method using a solution derived from Ba(CH3COO)2, Sr(CH3COO)2, and Ti(O-i-C3H7)4. The growth of the film was found to depend on the annealing condition. A (Ba,Sr)TiO3 thin film annealed at 1073 K was found to be a single crystal by transmission electron microscope. The single-crystal film exhibited a (100) three-axis orientation that followed the (100) orientation of the Pt substrate, as observed from an X-ray pole figure measurement and selected area electron diffraction patterns.
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