Abstract

Nanotwinned copper (nt-Cu) films with ⟨111⟩ crystal orientation were electroplated on Si wafers by pulse plating, with original grain size of ∼1.4 μm. By patterning and annealing the nt-Cu film at ...

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call