Abstract
An electromechanical resonator based on a blade geometry is proposed in this letter. This particular geometry allows self-alignment of the mechanical resonator structure to its lateral electrodes while achieving high eigenfrequencies in the GHz range. This letter reports both the fabrication process of the device and measurements in order to extract its mechanical response according to a lateral flexural solicitation. A mixing setup characterization is performed in order to suppress direct capacitive coupling feedthrough from the output current measurement and enable the effective quality factor extraction.
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