Abstract
In this paper we have developed a simple and inexpensive method to fabricate cilia-like silicone rubber-ferrofluid composite cantilever beams. The technique described can generate highly reproducible arrays of these microcantilevers ranging from 1 mm to 0.4 mm in diameter. We use a laser cutter to create moulds for the cantilevers making it a low cost and reliable process. The iron particles from the ferrofluid can uniformly dispersed, randomly arranged or isolated on the tip of the cantilever. Cantilevers with 400 μm diameter and up to 10 mm length are tested with low magnetic field of 15mT. We obtained maximum deflection of 82.5o at 44 mT magnetic field.
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