Abstract
Single crystal diamond offers superior properties for MEMS applications to polycrystalline forms of this material. Here, a process based solely on focussed ion beam milling (Ga), has been used to fabricate nanometre-width diamond cantilevers we lengths of several tens of microns. The procedure results in low damage structures with little Ga incorporation, following post-fabrication annealing. The triangular profile of a cantilever produced using this technique is shown, theoretically, to have a factor of three improved defection response to a load typically encountered during chemical sensing compared to a conventional rectangular lever of similar dimensions.
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