Fabrication and characterisation of Si micropillar PV structures

Abstract

Arrays of vertical silicon micropillar radial junction solar cells have been fabricated by diffusion of direct application spin on dopant and from the vapour phase through proximity rapid thermal diffusion. The micropillars were fabricated by optical lithography and deep reactive ion etching. The micropillar arrays show superior antireflective properties over the measured spectrum and good correlation to finite difference time domain modelling of identical geometry arrays. Junctions formed by a conventional spin on doping process of phosphorus containing dopant solution produced Suns-Voc values in the region of 0·3 V. This value is likely due to difficulties encountered in achieving an even distribution of dopant over the entire surface of the arrays. An alternative method utilising spin on dopant but employing an intermediate vapour phase diffusion step produced promising results with Suns-Voc values reaching 0·5 V following a post-diffusion drive-in step.