Fabrication and applications of flexible inorganic ferroelectric thin films

Abstract

Inorganic ferroelectric films exhibit excellent electric and optic properties, which have been widely used in dielectrics, memory, piezoelectric, photoelectric devices, etc. However, conventional synthesis strategies based on rigid single-crystal substrates severely limit their applications in flexible electronics. Realization of flexible inorganic ferroelectric films can introduce the excellent properties of inorganic ferroelectric materials into flexible devices, which is the developing trend for the next generation of electronic devices. In this review, the strategies to fabricate flexible inorganic perovskite structures’ ferroelectric films are summarized, including 1) direct growth on flexible substrates, 2) transferring ferroelectric film from a rigid substrate to a flexible one. Subsequently, the applications of flexible inorganic ferroelectric films are briefly introduced. Finally, research status, prospects and future development trend of flexible inorganic ferroelectric films are discussed.