Abstract
Dynamic analysis of well-bonding sandwich-alike driving diaphragms, made of ionic conductive polymer (ICP), and an innovative fabrication technique to micro-machine them are reported. Firstly, the dynamics of ICP film (ICPF), serving as an actuator, is theoretically studied and described in governing equation via chemical and mathematical analysis. The purpose is to explore the explicit expression in differential equation upon the direct connection of the induced lateral deflection of ICPF with respect to exerted electrical field. This is the first major issue of this paper: output/input relation. The other major issue is its fabrication technology. That is, the structure layers, made of polydimethylsiloxane (PDMS), and the sandwiched ICPF are successfully integrated as a monolithic driving actuator by an innovative fabrication technique. As for technology, there are three challenging targets to be well achieved. First of all, the novel method to fabricate ICPF actuators is well developed to overcome conventionally insufficient adhesion of added-externally electrodes upon ICPF. Secondly, the ICPF has to be kept right straight and flat as it is fabricated, even though its thickness is far less than its length. Lastly, the ICPF has to function in aqueous environment that is fully taken into consideration at the stage of fabrication.
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