Abstract

The feasibility of waste collection strikethrough in the traditional evaporation deposition system after preparing thin films was investigated. In this paper, first, the Selenium thin films of 0.5 μm thickness were prepared by a thermal vacuum evaporation system and an evaporation assisted laser Neodymium - Yag pulsed Nd:YAG laser system. Then, the waste materials that remain in the systems were collected and examined. The inspections include the particle size and other structural properties, taken before and after annealing at 300 °C for 30 min. Results show that the prepared thin film and particles are crystalline and the particle size of collected particles are in the range of about <50 nm, which makes this method very useful in the production of recycled nanoparticles of metals and materials that are costly or harmful, but can be an advantage and beneficial.

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