Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper

Abstract

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devi ces. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is c omputationally less extensive and low cost. System level simulations ar e based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses th e behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425µm. With some minor changes in design, this range can b e enhanced to 15µm at 85V. level while at system level, constituent components of the MEMS are integrated to study the dynamic behavior of the complete system under the given operating conditions (1)-(2). Process level is rigorously related to fabrication process simulation. The 3D model of a MEMS device can be generated by using a process definition, an associa ted material properties database and a designer created 2D layou t. Process level is necessary to proceed ahead to physical lev el simulation. ANSYS, COMSOL, CoventorWare Analyzer based on Finite Element Methods (FEM) are usually used at physical level to find the 3D solution. These simul ations take very long time to execute even in days and weeks. T his elongates the design cycle time and increases compu tational cost. Reduce Order Modeling (ROM) can be used to overcome above mentioned problems (3)-(4) but optimization at device