Abstract
An abnormal phenomenon, low energy ion induced X-ray emission from insulators is reported and discussed. Irradiation with He + , Ga + , Ar + , and Xe + ions in energy from 5 to 100 keV induces strong characteristic X-ray emission from insulator targets but not from conductive ones. The phenomenon is different from the high energy ion induced X-rays, such as PIXE (particle induced X-ray emission) in several aspects, such as very low energy of the used ions, existence of upper limit energy for the ion to induce X-rays. It is implied that the phenomenon relates not only to plus charging-up on surface of the irradiated specimen but may also to ion irradiation related process, such as sputtering. However, further study has to be done for a precise mechanism of the phenomenon. Features, such as high X-ray yields, suggest the phenomenon has potential applications in element analysis and studying ion-solid interaction.
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