Abstract
Ti-coated Si microcavity have been developed as a selective emitter for micro thermovoltaic power generation system. For microcavity fabricated with vacuum arc evaporation, the emittance spectra correspond well to the electromagnetic resonance modes. By using a Ge PVcell, energy conversion efficiency with the present microcavity at 900℃ is found to be 3.4 %, which is in good agreement with the estimates with an equivalent circuit model. It is estimated that the energy conversion efficiency is increased to 12.3 % for the emitter temperature of 1200℃
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