Abstract
We designed a new electrostatically driven scanning mirror which consists of a circular mirror plate and an elliptic outer frame with vertical combs. The rotational actuation is done by the vertical combs attached to the elliptic outer frame. To increase the actuation force, stationary vertical comb electrodes are arranged on the upper and lower sides of the moving comb fingers, simultaneously. This eye-type mirror showed larger deflection angle compared to those of the previous works such as using rectangular and elliptic mirrors. The diameter of the mirror plate is 1.0 mm, and the lengths of the major and minor axes of the outer frame are 2.5 and 1.0 mm, respectively. Using this scanning mirror, we obtained an optical scanning angle of 32° when driven by sinusoidal driving voltage of system's resonant frequency in range of 22.1–24.5 kHz with 100 V dc bias voltage. We demonstrated a full color XGA-resolution video image with screen diagonal size over 30 in. using the eye-type scanning mirror.
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