Extremely foldable LTPS TFT backplane using blue laser annealing for low‐cost manufacturing of rollable and foldable AMOLED display

Abstract

AbstractThe crystallization of a‐Si by blue laser annealing (BLA) is introduced for low‐cost, high‐resolution thin‐film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low‐temperature polycrystalline silicon (LTPS) with protrusion‐free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field‐effect mobility of 169 cm2/Vs, a smaller subthreshold voltage swing less than 201 mV/dec, and excellent electrical stability and mechanical robustness.