Abstract
AbstractThe crystallization of a‐Si by blue laser annealing (BLA) is introduced for low‐cost, high‐resolution thin‐film transistor (TFT) backplanes for foldable and rollable AMOLED displays. A big advantage of BLA is to provide low‐temperature polycrystalline silicon (LTPS) with protrusion‐free active channel. The BLA LTPS TFT manufactured on flexible substrate exhibits high field‐effect mobility of 169 cm2/Vs, a smaller subthreshold voltage swing less than 201 mV/dec, and excellent electrical stability and mechanical robustness.
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