Abstract
This paper has investigated the transmission characteristics of inverse polarizing gratings with tapered slits in the deep ultraviolet band. It is demonstrated that the extraordinary suppressed transmission (EOST) of TM-polarized light can be boosted up by tapered slits. The exit and entrance aperture widths of the tapered slits play a crucial role in polarization transmission, not the taper angle. The TM transmission valley and extinction ratio peak appear about the same exit aperture width for different grating heights. The phenomenon can be partly explained as the exit aperture width satisfying the charge movement is in a low-frequency mode to suppress TM transmission further. The presented results provide the basis to quickly focus the structural parameters of grating with excellent polarization performance.
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