Abstract
We expand on a different approach for extracting a roughness parameter (perpendicular component) from standard specular θ−2θ x-ray resonant scattering scans. Modulated in the scattering patterns are the chemical and magnetic characteristics of the thin film and interface. Continuous media-based modeling of these spectra gives sharp Bragg features unlike the broadened features of the measured spectra due to interfacial roughness. Here we examine the effect of roughness due to the incoherent contribution to the scattered light from islands with varying thicknesses. The summed spectrum is computed from the calculated spectra at different thicknesses, which are used as a basis set, added incoherently according to a thickness distribution. The mean and rms thickness values of the distribution control the periodicity and depth of the interference patterns in the spectra, respectively.
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