Abstract
In this work, quick imaging measurements at different X-ray penetration depths, including the total-reflection region and Bragg reflection angles, were used to characterize the X-ray multilayer inner structure. We then measured the interface replication factor, intrinsic layer growth, and layer inhomogeneity, as these medium-spatial-frequency structural parameters are worthy of attention for demanding X-ray imaging and focusing applications. We compared conventional analysis methods to the speckle scanning technique, as it provides important phase-contrast and dark-field information. The method proposed here remedies the limitations of conventional methods and affords the possibility of in-situ determination of complex buried layers, localized strain or defects, and other statistical anomalies.
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