Abstract
In this work, we investigate the extraction efficiency for UV emitting rectangular 300 x 300 μm 2 gallium nitride (GaN) based light emitting diodes (LEDs) by simulation with a raytracer tool. It is shown that the extraction efficiency depends strongly on slight variations of the absorption in the GaN layers. Furthermore, the influence of the substrate shape is studied. For standard rectangular sapphire substrate based LEDs the calculated extraction efficiency is 12.4%, whereas for silicon carbide substrate based devices the higher refractive index causes a lower efficiency (4.5%). Using a shaped SiC substrate the extraction efficiency can be improved to 17.2% and 19.9% for a sapphire substrate. The influence of geometric design parameters like sidewall angle are analyzed as well.
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