Abstract
Inductors on high resistivity substrate, such as quartz or high resistivity silicon(HR-Si), can get better Q factor than those on low resistivity substrate, which makes it necessary to research the substrate influence on inductors. In this paper, a lumped element model for on-chip inductor that includes skin and proximity effects, substrate electric and magnetic losses at high-frequency range is presented. The proposed model has been verified with square spiral inductors with various geometrical configurations on quartz, SOI and high-resistivity silicon substrate. It shows good agreement with the simulation and tested results. This model can be easily used in circuit simulations and optimization design.
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