Abstract

We have investigated plasma–surface interactions by performing molecular dynamics (MD) simulations. However, such simulations have a high computation cost and are limited to simulations of materials of nanometer order. In order to overcome this limitation, a complementary model based on the binary collision approximation (BCA) can be established. We employed the BCA-based simulation code ACAT and extended it to handle any crystalline or amorphous structure. The extended code, named "AC∀T", stores the positions of all projectile and target atoms and the velocities of recoil atoms so that it can be combined with the MD code. It also has the potential to reproduce channeling phenomena. Thus, it is expected to be useful for the evaluation of channeling effects.

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