Extended depth-range dual-wavelength interferometry based on iterative two-step temporal phase-unwrapping

Abstract

For dual-wavelength interferometry (DWI), we propose an extended depth-range phase-shifting interferometry technique of extracting phase distributions from randomly phase-shifted interferograms. First, the generalized phase-shifting algorithm is utilized to retrieve the single-wavelength phase from interferograms with random phase shifts. Then, the phase difference and phase-sum are calculated from the wrapped single-wavelength phases, and iterative two-step temporal phase-unwrapping is introduced to unwrap the phase-sum. Finally, the height of objects is determined. Simulations and experiments are conducted to demonstrate the excellent precision and overall performance of the proposed method. As the limitation of being exclusively applicable to interferograms with special phase shifts is broken, the proposed method will greatly facilitate the practical application of DWI. Furthermore, because the phase-sum and iterative two-step temporal phase-unwrapping is introduced to extend the depth-range, the sensitivity and precision of the retrieved phase are greatly improved.