Abstract
In order to bridge the increasing gap between the micro‐ and nanotechnologies, a European consortium is currently developing and investigating a cluster of mobile, wireless cubic centimetre‐sized microrobots. The control and sensor issues which are to be solved for such a robot system are demanding. This paper describes the work carried out by one of the project partners. An interferometrical principle employing the so‐called “mechanical” interferometer based on the Moiré‐effect is used for the position sensor system. Further sensor systems involve “local” microscope cameras, for which the extraction of depth information is crucial.
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