Abstract
Gaussian profile is conventionally assumed as the probe shape of the incident electron beam in theoretical analysis of dimensional measurements by a scanning electron microscope (SEM). However, it is not suitable for samples with small and tiny structure. In this paper, a model of a focusing electron beam with finite width due to aberration was used in simulating the SEM image of gold particles/balls on a carbon substrate. An effective electron beam shape (EEBS) was displayed and was found that it deviates significantly from the Gaussian profile. The difference between images simulated by Monte Carlo method with ideal electron incident beam, electron beam focusing model and with ideal beam incident then convoluted by Gaussian profile were discussed in detail. Furthermore, the influence of external electric field effect: full extraction and no extraction for imaging were studied.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
