Abstract
A method is built for describing the relationship between adhesion strength and chemical states of Co/polymer and Cr/polymer interfaces. Based on the chemical bonding model, the adhesion strength is confirmed to be dominated by the metal–organic complex at the interfaces. For Cr/polymers interfaces, the formation of metal–organic complex is restricted by the oxidation of metal atoms during deposition, which leads to almost no variation in adhesion from low [benzocyclobutene(BCB)] to high (AZ 4620) oxygenated polymers. On the other hand, a strong adhesion is observed at the Co/BCB interface that arises from the metal–organic bonds associated with hydroxyl groups in the polymer. The method is expected to provide clear analysis to other metal–polymer interfaces for seeking proper combination in heterogeneous integration.
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