Abstract
Structural-thermal-mechanical properties are examined for various cross-linked amorphous SU-8 samples via Fourier transform infrared (FTIR), differential scanning calorimetry (DSC), and nanoindentation, respectively. It is found that room temperature FTIR spectra provide less cross-linking (%) estimation than baking temperature spectra due to the mobility effect of polymer chains. DSC results show that glass transition temperature (Tg) is increasing with the extent of cross-linking (%). However, the correlation of Tg with FTIR measured cross-linking (%) will not be accurate because during DSC characterization sample will undergo cross-linking. From nanoindentation, counter-intuitive results are obtained by the conventional method for reduced elastic modulus (Er) and hardness (H), i.e., decrease with an increase in cross-linking (%). The possible errors, i.e., physical phenomena and methodology, have been analyzed thoroughly for these trends. After minimization/elimination of physical phenomena errors, it is found that current analysis methods are not accurate to estimate Er and H for glassy polymers.
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