Abstract

A new imaging method known as Neutral Atom Microscopy (NAM) or Scanning Helium Microscopy promises to open a unique window to the nature of surfaces at the first atomic layer. The thermal energy, non‐charged beam of atoms used allows exploring samples without the destructive effects of energetic particles or electric charges, in addition to having no topographic limitations due to the aspect ratio or shape of a solid probe tip, and with resolution potentially far better than conventional far‐field optical microscopes. Contrast mechanisms which produce surface composition information have long been known from atomic scattering experiments, such as by atomic diffraction from crystal surfaces or contrast due to surface roughness. These are now being explored in images for the first time.

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