Exploration and Realization of Novel High-Q Bulk Modes Using Support Transducer Topology

Abstract

This work reports an exploratory study of novel high quality factor acoustic modes that can be excited using the support transducer topology. The removal of the piezoelectric transducer layer from the high energy confinement mode eliminates the charge cancellation bottleneck. To excite the targeted modes, a frequency match between the thin film piezoelectric on substrate (TPoS) transducer arm and the central Silicon based high quality factor (Q) resonant tank is necessary. The concept of scaling up the frequency without shrinking the device dimensions by exciting higher-order modes has been verified using a third-order Lamé mode. The device exhibits a <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}$ </tex-math></inline-formula> of 21,632 for a resonant frequency of 58.5MHz. Unexplored modes such as the combination of a square extension mode and a radial contour mode operating in an out-of-phase manner, multiple new higher-order modes, etc. exhibiting very high- <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}$ </tex-math></inline-formula> have been realized. The average <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${Q}$ </tex-math></inline-formula> values of these new resonator designs range between 15,000 and 50,000, which is exceptional for piezoelectric transduction-based Microelectromechanical resonators. The idea of excitation of degenerate modes using silicon aligned along non-<100> and non-<110> crystalline axes has also been verified. The proof-of-concept of going beyond the traditional approach of resonance excitation scheme will pave the way to the investigation of unexplored modes that hold immense potential across various sectors of MEMS. [2021-0075]